Etching Innerlayers
by Rudy Sedlak, RD Chemical Company
- Introduction
- Etching Equipment and Configuration
- Etch Conditions and Operating Parameters
- The Chemistry of the Cupric Chloride Etching Process
- Chemistry of the Cupric Chloride and Ammoniacal Etchants
- Replenishment of the Cupric Chloride Etchant
- The Chemistry of the Ammoniacal Etch
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- Waste Treatment